JPH0420226U - - Google Patents
Info
- Publication number
- JPH0420226U JPH0420226U JP6172390U JP6172390U JPH0420226U JP H0420226 U JPH0420226 U JP H0420226U JP 6172390 U JP6172390 U JP 6172390U JP 6172390 U JP6172390 U JP 6172390U JP H0420226 U JPH0420226 U JP H0420226U
- Authority
- JP
- Japan
- Prior art keywords
- projection exposure
- pattern detection
- reduction projection
- reduction
- data processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 4
- 238000005259 measurement Methods 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000000034 method Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6172390U JPH0420226U (en]) | 1990-06-13 | 1990-06-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6172390U JPH0420226U (en]) | 1990-06-13 | 1990-06-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0420226U true JPH0420226U (en]) | 1992-02-20 |
Family
ID=31590223
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6172390U Pending JPH0420226U (en]) | 1990-06-13 | 1990-06-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0420226U (en]) |
-
1990
- 1990-06-13 JP JP6172390U patent/JPH0420226U/ja active Pending
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